Autocorrelation function analysis of phase formation in the initial stage of interfacial reactions of multilayered titanium-silicon thin films

Thin Solid Films

Volumn 469-470, Issue SPEC. ISS., 2004, Pages 513-517

  Yang, T H ^a   Cheng, S L ^a   Chen, L J ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Amorphous; Multilayer; Nanocrystallite; Ti silicides

Indexed keywords

AMORPHOUS MATERIALS; MULTILAYERS; NANOSTRUCTURED MATERIALS; TITANIUM ALLOYS; TRANSMISSION ELECTRON MICROSCOPY; X RAY SCATTERING;

AUTOCORRELATION FUNCTION (ACF); HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPY (HRTEM); TI SILICIDES;

THIN FILMS;

EID: 10044270890     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.07.039     Document Type: Article

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