Programmable microshutter arrays for the JWST NIRSpec

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 87-88

  Kutyrev, A S ^a   Moseley, S H ^a   Boucarut, R A ^a   Jhabvala, M ^a   Li, M ^a   Schwinger, D S ^a   Silverberg, R F ^a   Wesenberg, R P ^a  

^a NONE

Author keywords

Coatings; Electrodes; Fatigue; Large scale systems; Mechanical systems; Silicon; Soft magnetic materials; Spectroscopy; Telescopes; Voltage

Indexed keywords

ACCESS CONTROL; COATINGS; ELECTRIC POTENTIAL; ELECTRODES; FATIGUE OF MATERIALS; GALAXIES; INFRARED SPECTROMETERS; LARGE SCALE SYSTEMS; MECHANICS; MOEMS; OPTICAL SHUTTERS; RED SHIFT; SILICON; SPACE TELESCOPES; SPECTROGRAPHS; SPECTROSCOPY; TELESCOPES;

EARLY UNIVERSE; HIGH REDSHIFT-GALAXIES; JAMES WEBB SPACE TELESCOPE; MECHANICAL SYSTEMS; MICRO-ELECTRICAL MECHANICAL SYSTEMS; MICROSHUTTER ARRAYS; MULTI-OBJECT SPECTROGRAPH; NEAR INFRARED SPECTROMETER;

SOFT MAGNETIC MATERIALS;

EID: 10044252795     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233480     Document Type: Conference Paper

References (0)