Inference engine for process diagnostics and functional correlation in surface metrology

Wear

Volumn 257, Issue 12 SPEC.ISS., 2004, Pages 1257-1263

  Muralikrishnan, B ^a   Raja, J ^a  

^a University of North Carolina at Charlotte   (United States)

Author keywords

Diagnostics; Inference; Surface metrology

Indexed keywords

COMPUTATIONAL METHODS; CORRELATION METHODS; FITS AND TOLERANCES; INFERENCE ENGINES; SPECIFICATIONS; TEXTURES;

FUNCTIONAL CORRELATION; PROCESS DIAGNOSTICS; SURFACE TEXTURE ANALYSIS;

SURFACE PHENOMENA;

INDUSTRIAL APPLICATION; MEASUREMENT METHOD; TEXTURE;

EID: 10044236480     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2004.09.021     Document Type: Conference Paper

References (11)

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