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Volumn 24, Issue 6, 2004, Pages 1735-1739
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Processing and properties of BST thin films for tunable microwave devices
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Author keywords
BaTiO3 and titanates; Dielectric properties; RF magnetron sputtering; Thin films
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Indexed keywords
CRYSTALLINE MATERIALS;
DIELECTRIC MATERIALS;
MICROWAVE DEVICES;
MORPHOLOGY;
PEROVSKITE;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
TUNING;
X RAY DIFFRACTION ANALYSIS;
DIELECTRIC MEASUREMENTS;
BARIUM COMPOUNDS;
DIELECTRIC PROPERTY;
FILM THICKNESS;
MICROWAVE RADIATION;
PROCESSING TECHNIQUE;
SPUTTERING;
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EID: 0942301925
PISSN: 09552219
EISSN: None
Source Type: Journal
DOI: 10.1016/S0955-2219(03)00485-0 Document Type: Article |
Times cited : (58)
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References (10)
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