Preferentially Oriented Ferroelectric Pb(Zr0.53Ti 0.47)O3 thin films on (110) BaRuO3/Ru/SiO 2/Si Substrates

Electrochemical and Solid-State Letters

Volumn 7, Issue 1, 2004, Pages

  Wang, Y K ^a   Tseng, T Y ^a   Lin, Pang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; MICROSTRUCTURE; MORPHOLOGY; PERMITTIVITY; POLARIZATION; SECONDARY ION MASS SPECTROMETRY; SILICA; SOL-GELS; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

CAPACITANCE-VOLTAGE CHARACTERISTICS; SILICON SUBSTRATES;

FERROELECTRIC THIN FILMS;

EID: 0942288670     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1626991     Document Type: Article

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