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Volumn 24, Issue 6, 2004, Pages 999-1003
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Airflow deposition of oxide electroceramic films
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Author keywords
Airflow deposition; Films; Piezoelectric properties; PZT; Sensors
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Indexed keywords
BARIUM COMPOUNDS;
CRYSTAL ORIENTATION;
DEPOSITION;
LEAD COMPOUNDS;
PERMITTIVITY;
SINTERING;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
ZINC OXIDE;
BREAKDOWN FIELDS;
CERAMIC MATERIALS;
AIRFLOW;
CERAMICS;
FILM;
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EID: 0942278190
PISSN: 09552219
EISSN: None
Source Type: Journal
DOI: 10.1016/S0955-2219(03)00390-X Document Type: Article |
Times cited : (8)
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References (10)
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