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Volumn 24, Issue 6, 2004, Pages 999-1003

Airflow deposition of oxide electroceramic films

Author keywords

Airflow deposition; Films; Piezoelectric properties; PZT; Sensors

Indexed keywords

BARIUM COMPOUNDS; CRYSTAL ORIENTATION; DEPOSITION; LEAD COMPOUNDS; PERMITTIVITY; SINTERING; THIN FILMS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

EID: 0942278190     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-2219(03)00390-X     Document Type: Article
Times cited : (8)

References (10)
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    • Effects of oxygen partial pressure on lead content of PLZT thin films produced by excimer laser deposition
    • Peterson G.A. McNell J.R. Effects of oxygen partial pressure on lead content of PLZT thin films produced by excimer laser deposition Thin Solid Films 220 1992 87
    • (1992) Thin Solid Films , vol.220 , pp. 87
    • Peterson, G.A.1    McNell, J.R.2
  • 3
    • 0000860532 scopus 로고
    • 3 thin films by metalorganic chemical vapor deposition
    • 3 thin films by metalorganic chemical vapor deposition J. Appl. Phys. 71 1992 1955
    • (1992) J. Appl. Phys. , vol.71 , pp. 1955
    • Okada, M.1    Tominaga, K.2
  • 5
    • 0034887667 scopus 로고    scopus 로고
    • Routes to net shape electroceramic devices and thick films
    • Su B. Pearce D.H. Button T.W. Routes to net shape electroceramic devices and thick films J. Eur. Ceram. Soc. 21 2001 2005-2009
    • (2001) J. Eur. Ceram. Soc. , vol.21 , pp. 2005-2009
    • Su, B.1    Pearce, D.H.2    Button, T.W.3
  • 6
    • 0032154046 scopus 로고    scopus 로고
    • Application of gas jet deposition method to piezoelectric thick film miniature actuator
    • Schroth A. Maeda R. Akedo J. Ichiki M. Application of gas jet deposition method to piezoelectric thick film miniature actuator Jpn. J. Appl. Phys. 37 1998 5342-5344
    • (1998) Jpn. J. Appl. Phys. , vol.37 , pp. 5342-5344
    • Schroth, A.1    Maeda, R.2    Akedo, J.3    Ichiki, M.4
  • 7
    • 0033343602 scopus 로고    scopus 로고
    • 3) thick films deposited by aerosol deposition method
    • 3) thick films deposited by aerosol deposition method Jpn. J. Appl. Phys. 38 1999 5397-5401
    • (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 5397-5401
    • Akedo, J.1    Lebedev, M.2
  • 9
    • 0035557170 scopus 로고    scopus 로고
    • Fabrication and properties of low temperature sintered PZT-PMN films
    • Spring Meeting
    • Stytsenko, E. and Daglish, M., Fabrication and properties of low temperature sintered PZT-PMN films. Mat. Res. Soc. Symp. Proc., 2001, 666, F10.5.1-F10.5.6 (Spring Meeting).
    • (2001) Mat. Res. Soc. Symp. Proc. , vol.666
    • Stytsenko, E.1    Daglish, M.2
  • 10
    • 84951038270 scopus 로고
    • Nonohmic properties of zinc oxide ceramics
    • Matsuoka M. Nonohmic properties of zinc oxide ceramics Jpn. J. Appl. Phys. 10 1971 736-746
    • (1971) Jpn. J. Appl. Phys. , vol.10 , pp. 736-746
    • Matsuoka, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.