Electrical properties of low-inductance barium strontium titanate thin film decoupling capacitors

Journal of the European Ceramic Society

Volumn 24, Issue 6, 2004, Pages 1873-1876

  Kurihara, Kazuaki ^a   Shioga, Takeshi ^a   Baniecki, John D ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

BaTiO3 and titanates; Capacitors; Dielectric properties; Films

Indexed keywords

BARIUM COMPOUNDS; INDUCTANCE; LSI CIRCUITS; SPUTTER DEPOSITION; THIN FILMS;

MULTILAYERED CERAMIC CAPACITORS (MLC);

CERAMIC CAPACITORS;

ELECTRICAL PROPERTY;

EID: 0942269410     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-2219(03)00538-7     Document Type: Article

References (4)

1. 3 thin films on indium-tin-oxide coated glass substrates J. Appl. Phys. 75 1994 7998-8003
2. 3 thin films by ArF excimer laser ablation Jap. J. Appl. Phys. 33 1994 L533-L536
3. Tahan, D., Safari, A. and Klein, L.C., Sol-gel preparation Barium-Strontium Titanate thinfilm. In: International Symposium on Application of Ferroelectrics, 1995, pp. 427-430.
4. 3/Pt thin film capacitors J. Appl. Phys. 89 2001 2873-2885