Electrochemical etching of a shape memory alloy using new electrolyte solutions

Journal of Micromechanics and Microengineering

Volumn 14, Issue 1, 2004, Pages 76-80

  Mineta, Takashi ^a  

^a YAMAGATA RESEARCH INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ELECTROLYTES; ETCHING; METHANOL; MICROACTUATORS; MICROMACHINING; SURFACES;

ELECTROCHEMICAL ETCHING; INORGANIC SALT;

SHAPE MEMORY EFFECT;

EID: 0942267235     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/1/310     Document Type: Article

References (5)

1. Allen DM and Chen T T 1997 The electrochemical micromachining of microactuator devices from sputterd NiTi thin film Electrochem. Soc. Proc. 97-5 72-8
2. Kohl M, Quandt E, SchBler A, Trapp R and Allen D M 1994 Characterization of NiTi shape memory microdevices produced by microstructuring of etched sheets or sputter deposited films Proc. 4th New Actuators (Actuator '94) (Bremen, Germany) pp 317-20
3. Mineta T, Mitsui T, Watanabe Y, Kobayashi S, Haga Y and Esashi M 2000 Batch fabricated flat winding shape memory alloy actuator for active catheter Proc. IEEE MEMS'00 pp 375-80
4. Mineta T, Mitsui T, Watanabe Y, Kobayashi S, Haga Y and Esashi M 2001 Transducers'01 pp 698-701
5. Izutsu K 1995 Electrochemistry of Non-Aqueous Solution (Baifukan) (in Japanese)