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Journal of the Electrochemical Society

Volumn 151, Issue 1, 2004, Pages

Effect of selected ionic inorganic surface contaminants on thermal oxidation of p-type polished silicon wafers

(2) Scott, William D S a Stevenson, Alan a

a SHIN ETSU CHEMICAL CO LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY OF SOLIDS; NEGATIVE IONS; POSITIVE IONS; SEMICONDUCTING BORON; SINGLE CRYSTALS; SUBSTRATES; THERMOOXIDATION;

BORON DOPED SILICON WAFER; SURFACE CONTAMINANT;

SILICON WAFERS;

EID: 0842311649 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1628239 Document Type: Article

Times cited : (10)

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