High-voltage constraints for vacuum packaged microstructures

Journal of Microelectromechanical Systems

Volumn 12, Issue 6, 2003, Pages 835-839

  Wilson, Chester G ^a   Gianchandani, Yogesh B ^a   Wendt, Amy E ^b  

^a University of Michigan   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

Electric breakdown; Electrostatic devices; Microdischarge; Microplasma

Indexed keywords

CATHODES; ELECTRIC BREAKDOWN; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; ELECTROSTATIC DEVICES; MICROELECTRODES; MICROSTRUCTURE; PLASMAS;

HIGH VOLTAGE CONSTRAINTS; HIGH VOLTAGE MICROSYSTEMS; MICRODISCHARGE; MICROPLASMA; PASCHENS CURVE; VACUUM PACKAGED MICROSTRUCTURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0742304002     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.820278     Document Type: Article

References (14)

1. L. J. Hornbeck, "Current status of the digital micromirror device (DMD) for projection television applications," in Tech. Dig. IEEE Int. Electron Devices Meeting, 1993, pp. 381-4.
2. B. Gogoi, C. Chuan, and C. Mastrangelo, "Force balanced micro-machined pressure sensors," IEEE Trans. Electron Devices, vol. 48, pp. 1575-84, Aug. 2001.
3. T. Tsuchiya, Y. Kageyama, H. Funabashi, and J. Sakata, "Polysilicon vibrating gyroscope vacuum encapsulated in an on-chip microchamber," Sens. Actuators, vol. A90, no. 1-2, pp. 49-55, May 2001.
4. F. Ayazi, H. H. Chen, F. Kocer, H. Guong, and K. Najafi, "A HARPSS polysilicon vibrating ring gyroscope," J. Microelectromech. Syst., vol. 10, pp. 169-79, June 2001.
5. T. Ono, Y. Dong, and M. Esashi. "Microdischarge and electric breakdown in a micro-gap," J. Micromech. Microeng., vol. 10, no. 3, pp. 445-51, Sept. 2000.
6. C. G. Wilson, A. E. Wendt, and Y. B. Gianchandani, "High voltage limits for electrostatic transducers: On the role of ambient pressure and device dimension in microdischarges," in Tech. Dig., Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, SC, June 2002, pp. 370-1.
7. C. Wilson and Y. Gianchandani, "Silicon micro-machining using in-situ DC microplasmas," J. Microelectromech. Syst., vol. 10, pp. 50-4, Mar. 2000.
8. J. C. T. Eijkel, H. Stoeri, and A. Manz, "A dc microplasma on a chip employed as an optical emission detector for gas chromatography," Anal. Chem., vol. 72, pp. 2547-2552, June 2000.
9. J. D. Cobine, Gaseous Conduct., NY: Dover, 1958, pp. 17-18.
10. L. G. H. Huxley and R. W. Crompton, The Diffusion and Drift of Electrons in Gases. New York: Wiley, 1974, pp. 627-631.
11. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing. New York: Wiley, 1994, pp. 64-77.
12. C. G. Wilson and Y. B. Gianchandani, "Special detection of metal contaminants in water using an on-chip microglow discharge," IEEE Trans. Electron Devices, vol. 49, pp. 2317-2322, Dec. 2002.
13. G. Jenkins and A. Manz, "Optical emission detection of liquid analytes using a micro-machined D.C. glow discharge device at atmospheric pressure," in Proc. Micro Total Analysis Systems, 2001, pp. 349-350.
14. S. J. Park, J. Chen, C. Liu, and J. G. Eden, "Silicon microdischarge devices having inverted pyramidal cathodes: Fabrication and performance of arrays," Appl. Phys. Lett., vol. 4, no. 78, pp. 419-21, Jan. 2001.