Distributed performance evaluation of a controlled IC fab

IEEE Transactions on Robotics and Automation

Volumn 19, Issue 6, 2003, Pages 1027-1033

  Kuo, Chung Hsien ^a   Huang, Han Pang ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Dispatching system; Distributed colored timed Petri net (DCTPN); Integrated circuit (IC) foundry fab; Manufacturing execution system (MES); Performance evaluation; Semiconductor manufacturing

Indexed keywords

DISTRIBUTED PARAMETER CONTROL SYSTEMS; INTEGRATED CIRCUIT MANUFACTURE; MATHEMATICAL MODELS; PETRI NETS; SEMICONDUCTOR DEVICE MANUFACTURE;

DISPATCHING SYSTEM; DISTRIBUTED COLORED TIME PETRI NET; INTEGRATED CIRCUIT FOUNDRY FAB; MANUFACTURING EXECUTION SYSTEM;

FACTORY AUTOMATION;

EID: 0442295568     PISSN: 1042296X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TRA.2003.819720     Document Type: Article

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