An automatic temperature control system operated via a predetermined model

Instruments and Experimental Techniques

Volumn 40, Issue 4, 1997, Pages 575-578

  Kaichev, V V ^a   Sorokin, A M ^b   Badalyan, A M ^a   Nikitin, D Yu ^a   Moskovkin, O V ^b  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

^b INSTITUTE FOR WATER AND ENVIRONMENTAL PROBLEMS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0348236110     PISSN: 00204412     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. Voronin, V.I., Prib. Tekh. Eksp., 1980, no. 6, p. 193.
2. Troyanovskii, A.M., Prib. Tekh. Eksp., 1983, no. 2, p. 225.
3. Puzyrev, V.A., Upravlenie tekhnologicheskimi protsessami proizvodstva mikroelektronnykh priborov (Control over Technological Processes of Production of Microelectronic Devices), Moscow: Radio i Svyaz', 1984, p. 112.
4. Stroscio, J.A., Richter, L.J., and Ho, W., Rev. Sci. Instrum., 1984, vol. 55, no. 5, p. 732.
5. Badalyan, A.M., Gaun, D.D., and Kaichev, V.V., Prib. Tekh. Eksp., 1993, no. 6, p. 199.