Low-loss as-grown germanosilicate layers for optical waveguides

Applied Physics Letters

Volumn 83, Issue 23, 2003, Pages 4743-4745

  Ay, Feridun ^a   Aydinli, Atilla ^a   Agan, Sedat ^b  

^a BILKENT UNIVERSITY   (Turkey)

^b KIRIKKALE UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GERMANIUM COMPOUNDS; GROWTH (MATERIALS); HIGH TEMPERATURE EFFECTS; HYDROGEN BONDS; LIGHT ABSORPTION; LIGHT POLARIZATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRESSURE MEASUREMENT; PROFILOMETRY; REFRACTIVE INDEX; SILANES; SILICON WAFERS; SUBSTRATES;

PLANAR WAVEGUIDES; PRECURSOR GASES; PROPAGATION LOSSES;

OPTICAL WAVEGUIDES;

EID: 0348197100     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1631753     Document Type: Article

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