The measurement of tiny dew droplets at the initial deposition stage and dew point using a phase-shift interference microscope

Measurement Science and Technology

Volumn 14, Issue 12, 2003, Pages 2075-2080

  Matsumoto, Shigeaki ^a  

^a Employment Promotion Project Corporation   (Japan)

Author keywords

Dew droplet; Dew point; Initial deposition stage; Phase shift interferometry

Indexed keywords

COPPER PLATING; MICROSCOPES; MIRRORS; OPTICAL CABLES; PHASE SHIFT; PIEZOELECTRIC TRANSDUCERS; SURFACE ROUGHNESS;

INITIAL DEPOSITION STAGE;

DROP FORMATION;

DROPLET; INTERFEROMETRY; MEASURING INSTRUMENT; PHASE SHIFT;

EID: 0348171978     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/14/12/005     Document Type: Article

References (6)

1. Matsumoto S and Toyooka S 1995 Laser dew-point hygrometer Japan. J. Appl. Phys. 1 34 316-20
2. Matsumoto S and Toyooka S 1995 Estimation of initial and response times of laser dew-point hygrometer Japan. J. Appl. Phys. 1 34 5847-52
3. Matsumoto S et al 1998 Improvement of the initial and the response times of the laser dew-point hygrometer based on measurement simulation Bull. Polytechnic Univ. 27A 33-40
4. Griffiths E 1922 Discussion on some modified forms of hygrometres Proc. Phys. Soc. 34 8-49
5. Matsumoto S et al 1998 Phase-shift interference microscope employing a simple method to depress speckle noises for the thickness measurement of thin films J. Vac. Sci. Technol. A 16 3145-7
6. Malacara D (ed) 1992 Optical Shop Testing (New York: Wiley) chapter 14