Infrared absorption studies in proton- and deuterium-implanted Si 1-xGex

Physica B: Condensed Matter

Volumn 340-342, Issue , 2003, Pages 803-807

  Pereira, R N ^a   Dobaczewski, L ^b   Bech Nielsen, B ^a  

^a AARHUS UNIVERSITY   (Denmark)

^b INSTITUTE OF PHYSICS   (Poland)

Author keywords

FTIR; Hydrogen; LVM; SiGe

Indexed keywords

ANNEALING; DEUTERIUM; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED RADIATION; LIGHT ABSORPTION; PROTON BEAMS;

INFRARED ABSORPTION; LOCAL VIBRATIONAL MODE (LVM);

SILICON ALLOYS;

EID: 0347946867     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2003.09.217     Document Type: Conference Paper

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