Single dopant diffusion in semiconductor technology

Mathematical Methods in the Applied Sciences

Volumn 27, Issue 2, 2004, Pages 133-154

  Glitzky, A ^a   Merz, W ^b  

^a Weierstrab Inst Angew Anal/S   (Germany)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Dopant diffusion; Non linear reaction drift diffusion equations

Indexed keywords

DIFFUSION IN SOLIDS; ELECTRIC CHARGE; ESTIMATION; NONLINEAR EQUATIONS; POINT DEFECTS; POISSON EQUATION;

DOPANT DIFFUSION; NON-LINEAR REACTION-DRIFT-DIFFUSION EQUATIONS;

SEMICONDUCTOR DOPING;

EID: 0347946806     PISSN: 01704214     EISSN: None     Source Type: Journal    
DOI: 10.1002/mma.447     Document Type: Article

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