Micro-objective lens with compact secondary electron detector for miniature low voltage electron beam systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3738-3741

  Liu, W ^a   Ambe, T ^b   Pease, R F ^a  

^a STANFORD UNIVERSITY   (United States)

^b FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347909873     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588659     Document Type: Article

References (10)

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