Surface Roughness of Sputter-deposited Gold Films: A Combined X-ray Technique and AFM Study

Surface and Interface Analysis

Volumn 27, Issue 7, 1999, Pages 670-677

  Schug, C ^a   Schempp, S ^a   Lamparter, P ^a   Steeb, S ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

AFM; Diffuse scattering; Gold films; SAXS; Self affine surface roughness; X ray reflectometry

Indexed keywords

EID: 0347807675     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199907)27:7<670::AID-SIA558>3.0.CO;2-1     Document Type: Article

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