Structural characteristics and applications of zirconium dioxide formed by super high-speed thermal treatment

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3179, Issue , 1997, Pages 180-183

  Lynkov, L M ^a   Soloviev, V V ^a   Zhdanovich, S V ^a   Petrov, N P ^a   Bogush, V A ^a  

^a BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS   (Belarus)

Author keywords

Auger spectroscopy; Metalorganic compositions of zirconium alcoholic solutions; Super high speed thermal treatment (SHSTT); X ray diffraction; Zr anodic oxides thin films; Zr thin films; ZrO 2; ZrO2(Y2O3)

Indexed keywords

ANODIC OXIDATION; AUGER ELECTRON SPECTROSCOPY; AUGERS; CRYSTALS; DIFFRACTION; ELECTRIC CONDUCTIVITY; HEAT TREATMENT; OSMIUM; OXIDES; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR MATERIALS; SOLIDS; SPEED; THIN FILMS; VAPOR DEPOSITION; X RAY ANALYSIS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; YTTRIUM ALLOYS; ZIRCONIA; ZIRCONIUM ALLOYS;

AUGER SPECTROSCOPY; METALORGANIC COMPOSITIONS OF ZIRCONIUM ALCOHOLIC SOLUTIONS; SUPER HIGH-SPEED THERMAL TREATMENT (SHSTT); ZR ANODIC OXIDES THIN FILMS; ZR THIN FILMS; ZRO 2; ZRO2(Y2O3);

ZIRCONIUM;

EID: 0347415942     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.276222     Document Type: Conference Paper

References (3)

1. L. Lynkov, S. Prishchepa, V. Solovyov, E. Tseyger. "Structure, Texture and Oldation of ZrO2 thin films." Solid State Physics Vol. 33 (1), 19-24 (1991).
2. L. Lynkov, V. Solovyov, Z. Shishankova, S. Prishchepa. "Zr Alcoxide Pulse Thermal Treatment on Various Substrates", Dokl. Belarussian Academy of Sciences 27(3), 45-47 (1993).
3. A. Deshkovskaya, V. Yanishevski, S. Gritsai, L. Lynkov. "Ion Synthesis in Coatings on Glasses", Nuclear Instr. and Method in Physics Research B 80/81, North-Holland, 1130-1132 (1993).