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Volumn 10, Issue 4, 2002, Pages 237-242

Advances in MOCVD technology for research, development and mass production of compound semiconductor devices

Author keywords

AlGaAs; AlGaInP; Doping uniformity; GaN; In situ charactrization; MOCVD technique

Indexed keywords

EID: 0347371756 PISSN: 12303402 EISSN: 18963757 Source Type: Journal
DOI: None Document Type: Article

Times cited : (11)

References (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.