In Situ Monitoring by Mass Spectrometry of Laser Ablation Plumes Used in Thin Film Deposition

ACS Symposium Series

Volumn 681, Issue , 1998, Pages 39-50

  Hastie, John W ^a   Paul, Albert J ^a   Bonnell, David W ^a   Schenck, Peter K ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347128742     PISSN: 00976156     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

References (16)

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2. Hastie, J.W.; Paul, A.J.; Yeheskel, J.; Bonnell, D. W.; Schenck, P.K. High Temp. Matls. Sci. 1995, 33, 135-169.
3. Hastie, J.W., Bonnell, D.W.; Paul, A.J.; Schenck, P.K. "Gasdynamics and Chemistry in the Pulsed Laser Deposition of Oxide Dielectric Thin Films" In Gas-Phase and Surface Chemistry in Electronic Materials Processing; Mountziaris, T.J., Paz-Pujalt, G.R., Smith, F.T.J., Westmorland, P.R., Eds.; MRS Symp. Series, Vol. 334; Materials Research Society: Pittsburgh, PA, 1994; 305-316.
4. Schenck, P.K.; Hastie, J.W.; Paul, A.J.; Bonnell, D.W. Opt. Eng. 1996, 35, 3199-3205.
5. Hastie, J.W.; Bonnell, D.W.; Schenck, P.K. Molecular Basis for Laser-Induced Vaporization of Refractory Materials; NBSIR 84-2983; National Technical Information Service: Washington, DC., 1984.
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7. 2" In 5th Intl. Symposium on High Temperature Materials Chemistry; Johnson, W.B., Rapp, R.A., Eds.; ECS Symp. Vol. PV90-18; Electrochemical Society: Pennington, NJ, 1990; 156-165.
8. 3 Pulsed Laser Thin Film Deposition" In Film Synthesis and Growth Using Energetic Beams; Atwater, H.A., Dickinson, J.T., Lowndes, D.H., Polman, A., Eds.; MRS Symp. Series Vol. 388; Materials Research Society: Pittsburgh, PA, 1996, 45-50.
9. Hastie, J.W. Combust. and Flame, 1973, 21, 187-194.
10. Hastie, J.W.; Bonnel, D.W. "Transpiration Mass Spectrometry: A New Thermochemical Tool" In Thermochemistry and Its Applications to Chemical and Biochemical Systems; Ribeiro da Silva, M. A. V.; Reidel Publishing: Boston, MA, 1984; 183-233.
11. Hastie, J.W.; Hager, J.P. "Vapor Transport in Materials and Process Chemistry" In Proc. The Elliott Symposium on Chemical Process Metallurgy, Iron and Steel Soc, Inc.: Warrendale, PA, 1990; 301-324.
12. Bonnell, D.W.; Hastie, J.W.; Zmbov, K.; High Temp. High Press. 1988, 20, 251-262.
13. Hastie, J.W.; Bonnell, D.W.; Schenck, P.K., High Temp. Sci. 1988, 25, 117-142.
14. Kools, J.C.S.; Riet, E. Van de.; Dieleman, J.; Appl. Surf. Sci. 1993, 69, 133-139.
15. Tyrrell, G.C.; York, T.; Cherief, N.; Givord, D.; Lawler J.; Lunney, J.G.; Buckley, M.; Boyd, I.W. Microelectronic Eng., 1994, 25, 247-252.
16. Champeaux, C.; Damiani, D.; Girault, C.; Marchet, P.P.; Mercurio J.P.; Catherinot, A. "Plasma Formation from Laser-Target Interaction; Basic Phenomena and Applications to Superconducting Thin Film Deposition" In Laser Ablation of Electronic Materials, Basic Mechanisms and Applications; Elsevier: Amsterdam, Netherlands, 1992; 141-165.