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Mikrochimica Acta

Volumn 125, Issue 1, 1997, Pages 173-177

Cu-N Films Grown by Reactive MSIP: Constitution, Structure and Morphology

(3) Von Richthofen, Alexander a Domnick, Ralph a Cremer, Rainer a

a RWTH AACHEN UNIVERSITY (Germany)

Author keywords

Copper nitride; Cu3N; Magnetron sputtering ion plating

Indexed keywords

EID: 0347077496 PISSN: 00263672 EISSN: None Source Type: Journal
DOI: 10.1007/bf01246182 Document Type: Article

Times cited : (8)

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