Thin films indentation size effects in microhardness measurements

Journal of Optoelectronics and Advanced Materials

Volumn 2, Issue 4, 2000, Pages 317-325

  Golan, G ^a   Rabinovich, E ^a   Axelevitch, A ^a   Seidman, A ^b   Croitoru, N ^b  

^a HOLON INSTITUTE OF TECHNOLOGY   (Israel)

^b TEL AVIV UNIVERSITY   (Israel)

Author keywords

Diamond like carbon; Microhardness; Size effects; Thin metallic films

Indexed keywords

CARBON FILMS; DEPOSITION; DIAMOND LIKE CARBON FILMS; DIAMONDS; FILM THICKNESS; ITERATIVE METHODS; MICROHARDNESS; SCANNING ELECTRON MICROSCOPY; SIZE DETERMINATION; STRUCTURAL DYNAMICS; THIN FILMS; VACUUM EVAPORATION;

DIAMOND LIKE CARBON; INDENTATION SIZE EFFECTS; MEASURING EQUIPMENTS; MICROHARDNESS MEASUREMENT; SIZE EFFECTS; THICKNESS OF THE FILM; THIN METALLIC FILMS; THIN-FILM PROPERTIES;

INDENTATION;

EID: 0347069049     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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