Moisture absorption and reaction in BPSG thin films

Journal of the Electrochemical Society

Volumn 150, Issue 12, 2003, Pages

  Thorsness, Adam G ^a   Muscat, Anthony J ^a  

^a University of Arizona   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; ANNEALING; BOROPHOSPHATE GLASS; BOROSILICATE GLASS; ELLIPSOMETRY; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MOISTURE; THERMODYNAMIC PROPERTIES; WATER ABSORPTION;

BOND STRENGTH; BOROPHOSPHOSILICATE GLASS THIN FILM; MOISTURE ABSORPTION;

THIN FILMS;

EID: 0347051557     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1623767     Document Type: Article

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