Safety and environmental concerns of CVD copper precursors

Solid State Technology

Volumn 41, Issue 9, 1998, Pages 101-106

  Zorich, Bob ^a,b   Majors, Mary ^a  

^a AIR PRODUCTS AND CHEMICALS INC   (United States)

^b Schumacher   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346943070     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

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