InAs/AlGaSb nanoscale device fabrication using AFM oxidation process

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 2, Issue 1-4, 1998, Pages 858-861

  Sasa, S ^a   Ikeda, T ^a   Dohno, C ^a   Inoue, M ^a  

^a OSAKA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

AFM oxidation; InAs AlGaSb; Nanofabrication

Indexed keywords

EID: 0346938112     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(98)00175-1     Document Type: Article

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