Modeling the thermal actuation in a thermo-pneumatic micropump

Journal of Electronic Packaging

Volumn 125, Issue 4, 2003, Pages 527-530

  Carmona, M ^a   Marco, S ^a   Samitier, J ^a   Acero, M C ^b   Plaza, J A ^b   Esteve, J ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTATIONAL COMPLEXITY; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; FLUIDIC DEVICES; HEAT TRANSFER; PNEUMATIC EQUIPMENT; PUMPS; TEMPERATURE DISTRIBUTION; THERMODYNAMICS; TRANSFER FUNCTIONS;

THERMAL ACTUATION; THERMOMECHANICAL SIMULATION; THERMOPNEUMATIC MICROPUMP;

MICROELECTROMECHANICAL DEVICES;

EID: 0346936442     PISSN: 10437398     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1604154     Document Type: Article

References (13)

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