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Volumn 67, Issue 7, 2001, Pages 1125-1129
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Development of precision feed mechanism by applying principle of walking drive (3rd report) - Development of dual-mode ultraprecision high-speed positioning system
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Author keywords
Feed mechanism; Piezoelectric actuator; Running drive; Ultraprecision high speed positioning; Walking drive
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Indexed keywords
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EID: 0346878630
PISSN: 09120289
EISSN: None
Source Type: Journal
DOI: 10.2493/jjspe.67.1125 Document Type: Article |
Times cited : (3)
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References (6)
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