Sub-nanometric precision displacement sensing using low mass and rough surfaces as movable targets

Optics and Laser Technology

Volumn 36, Issue 2, 2004, Pages 107-115

  Virdee, Manohar ^a  

^a GMV Consultants Limited   (United Kingdom)

Author keywords

Displacement sensing; Low mass targets and suitable in hostile environments; Nanometric precision; Non contacting; Phase quadrature; Rough and retro reflecting surfaces; Sub nanometric resolutions

Indexed keywords

ACTUATORS; HOLOGRAPHIC INTERFEROMETRY; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL RESOLVING POWER; OPTICAL SENSORS; PRESSURE MEASUREMENT; SPECKLE; TRANSDUCERS;

DISPLACEMENT SENSING; PHASE QUADRATURE;

LASER APPLICATIONS;

EID: 0346724486     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-3992(03)00140-3     Document Type: Article

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