A Linear Model for the Interpretation of Optical Emission Spectroscopy Measurements in Low Pressure dc Magnetron Sputtering

Contributions to Plasma Physics

Volumn 37, Issue 6, 1997, Pages 483-497

  Schulte, J ^a   Sobe, G ^a   Reiss, G ^a  

^a IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ARGON; ELECTRON ENERGY LEVELS; IONIZATION; LIGHT EMISSION; MAGNETRON SPUTTERING;

ARGON PRESSURE; D.C. MAGNETRON SPUTTERING; DC MAGNETRON SPUTTERING; DISCHARGES CURRENTS; EXCITED SPECIES; LINEAR MODELING; LOW PRESSURES; MAGNETRON DISCHARGES; OPTICAL-EMISSION SPECTROSCOPY; SPECTROSCOPY MEASUREMENTS;

OPTICAL EMISSION SPECTROSCOPY;

EID: 0346719537     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.2150370603     Document Type: Article

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