The solution of the inverse problem of ellipsometry for a nonuniform dielectric layer at a known substrate with the use of the second approximation of the perturbation theory

Optika i Spektroskopiya

Volumn 80, Issue 6, 1996, Pages 979-983

  Sheptunov, O A ^a   Abaev, M I ^a   Pliss, N S ^a  

^a NONE

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EID: 0346647562     PISSN: 00304034     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (21)

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