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Volumn 43, Issue 1, 2004, Pages 143-148

High-resolution photometric optical monitoring for thin-film deposition

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; DEPOSITION; REFLECTION; SILICA; SILICON; SURFACE ROUGHNESS;

EID: 0346639119     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.000143     Document Type: Article
Times cited : (6)

References (10)
  • 3
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    • Real-time optical characterization of GaP heterostructures by p-polarized reflectance
    • N. Dietz and K. Ito, "Real-time optical characterization of GaP heterostructures by p-polarized reflectance," Thin Solid Films, pp. 313-314, 614-619 (1998).
    • (1998) Thin Solid Films
    • Dietz, N.1    Ito, K.2
  • 4
    • 0029753518 scopus 로고    scopus 로고
    • Real-time optical monitoring of epitaxial growth processes by p-polarized reflectance spectroscopy
    • N. Dietz and K. J. Bachman, "Real-time optical monitoring of epitaxial growth processes by p-polarized reflectance spectroscopy," Mater. Res. Soc. Symp. Proc. 406, 341 (2001).
    • (2001) Mater. Res. Soc. Symp. Proc. , vol.406 , pp. 341
    • Dietz, N.1    Bachman, K.J.2
  • 5
    • 0035399232 scopus 로고    scopus 로고
    • Optical in situ monitoring of complex oxide thin film laser molecular beam epitaxy
    • F. Chen, H. Lu, T. Zhao, Z. Chen, and G. Yang, "Optical in situ monitoring of complex oxide thin film laser molecular beam epitaxy," J. Cryst. Growth 2001(7), 227-228, 950-954.
    • (2001) J. Cryst. Growth , Issue.7
    • Chen, F.1    Lu, H.2    Zhao, T.3    Chen, Z.4    Yang, G.5
  • 6
    • 0000858447 scopus 로고
    • Methods for determining film thickness and optical constants of films and substrates
    • M. Ruiz-Urbieta, E. M. Sparrow, and E. R. Eckert, "Methods for determining film thickness and optical constants of films and substrates," J. Opt. Soc. Am. 16, 351-359 (1970).
    • (1970) J. Opt. Soc. Am. , vol.16 , pp. 351-359
    • Ruiz-Urbieta, M.1    Sparrow, E.M.2    Eckert, E.R.3
  • 7
    • 0020940620 scopus 로고
    • Determination of the thickness and optical constants of amorphous silicon
    • R. Swanepoel, "Determination of the thickness and optical constants of amorphous silicon," J. Phys. E 16, 1214-1222 (1983).
    • (1983) J. Phys. E , vol.16 , pp. 1214-1222
    • Swanepoel, R.1
  • 8
    • 0017005929 scopus 로고
    • The determination of the refractive index and thickness of a transparent film
    • E. E. Khawaja, "The determination of the refractive index and thickness of a transparent film," J. Phys. D 9, 1939-1943 (1976).
    • (1976) J. Phys. D , vol.9 , pp. 1939-1943
    • Khawaja, E.E.1
  • 9
    • 0018441882 scopus 로고
    • Scalar scattering theory for multiplayer optical coatings
    • C. K. Carniglia, "Scalar scattering theory for multiplayer optical coatings," Opt. Eng. 18, 104 (1979).
    • (1979) Opt. Eng. , vol.18 , pp. 104
    • Carniglia, C.K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.