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Volumn 43, Issue 1, 2004, Pages 143-148
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High-resolution photometric optical monitoring for thin-film deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
COHERENT LIGHT;
DEPOSITION;
REFLECTION;
SILICA;
SILICON;
SURFACE ROUGHNESS;
FRESNEL REFLECTION;
OPTICAL LOSSES;
REAL TIME OPTICAL MONITORING;
SUBNANOMETER;
THIN FILM DPEOSITION;
PHOTOMETRY;
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EID: 0346639119
PISSN: 1559128X
EISSN: 15394522
Source Type: Journal
DOI: 10.1364/AO.43.000143 Document Type: Article |
Times cited : (6)
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References (10)
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