Chemistry of Ketal Resist System and Its Lithographic Performance

ACS Symposium Series

Volumn 706, Issue , 1998, Pages 95-109

  Huang, Wu Song ^a   Lee, Kim Y ^b   Bantu, Rao ^c   Kwong, Ranee ^a   Katnani, Ahmad ^a   Khojasteh, Mahmoud ^a   Brunsvold, William ^a   Holmes, Steven ^a   Nunes, Ronald ^a   Shibata, Tsuyoshi ^a,d   Orsula, George ^e   Cameron, James ^e   Yang, Dominic ^e   Sinta, Roger ^e  

^a IBM MICROELECTRONICS   (United States)

^b Etec Systems   (United States)

^c Olin Microelectronic Materials   (United States)

^d TOSHIBA CORPORATION   (Japan)

^e SHIPLEY COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346616941     PISSN: 00976156     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

References (11)

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2. Huang, W.S.; Kwong, R., Katnani, A.D.; Khojasteh, M., Proc. SPIE, 1994, 2195, 37
3. Lee, K.Y. and Huang, W.S., J. Vac. Sci. Tecnnol. B, 1993, 11(6), 2807
4. Huang, W.S., Kwong, R., Katnani, A.D.; Khojasteh, M.; and Lee, K.Y., Photopolymers SPE Conference, 1994, 96
5. Huang, W.S., Katnani, A.D.; Yang, D.; Brunsvold, B.; Bantu, R.; Khojasteh, M; Sooriyakumaran, R.; Kwong, R.; Lee, K. Y.; Hefferon, G.; Ursula, G.; Cameron, J.; Denison, M.; Sinta, R. and Thackeray, J., J. Photopolym. Sci. Technol., 1995, 8 (4), 525
6. Ito, H.; England, W.P.; Clecak, N.J.; Breyta, G.; Lee, H.; Yoon, D.Y.; Sooriyakumaran, R. and Hinsberg, W.D., Proc. SPIE, 1993, 1925, 65
7. Ito, H.; England, W.P.; Sooriyakumaran, R.; Clecak, N.J.; Breyta, G.; Hinsberg, W.D.; Lee, H.; Yoon, D.Y., J. Photopolym. Sci. Technol., 1993, 6(4), 547
8. Ito, H.; Breyta, G.; Hofer, D.; Sooriyakumaran, R., Polym. Mater. Sci. Eng., 1995, 72, 144
9. Ito, H.; Breyta, G.; Sooriyakumaran, R. and Hofer, D., J. Photopolym. Sci. Technol., 1995, 8(4), 505
10. Conley, W.; Breyta, G.; Brunsvold, B.; DePietro, R.; Hofer, D.; Holms, S.; Ito, H.; Nunes, R.; Ficftl, G.; Hagerty, P.; Thackeray, J., Proc. SPIE, 1996, 2724, 34
11. Mertesdorf, C.; Munzel, N.; Holzwarth, H.; Falcigno, P.; Schacht, H.-T.; Rohde, O.; Schulz, R.; Slater, S.G.; Frey, D.; Nalamasu, O.; Timko, A.G.; Neenan, T.X., Proc. SPIE, 1995, 2438, 84