A large volume microwave plasma source

Review of Scientific Instruments

Volumn 67, Issue 2, 1996, Pages 455-461

  Bowles, Jeffrey H ^a   Duncan, Dwight ^a   Walker, David N ^a   Amatucci, William E ^a   Antoniades, John A ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346519691     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146612     Document Type: Article

References (13)

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