A closed loop controller for electron-beam evaporators

Review of Scientific Instruments

Volumn 67, Issue 6, 1996, Pages 2366-2369

  Band, Alan ^a   Stroscio, Joseph A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346452270     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147049     Document Type: Article

References (19)

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4. Water cooled evaporation chamber from MDC Vacuum Products Corp., 23842 Cabot Blvd., Hayard, CA 94545, available as a special order.
5. Part No. PM-50 port multiplexer from Kimball Physics Inc., Kimball Hill Road, Wilton, NH 03086.
6. Part No. VZLM925 linear motion thimble from Kurt J. Lesker Co., 1515 Worthington Ave., Clairton, PA 15025.
7. Part No. 670004 rotary motion feedthrough from MDC Vacuum Products, 23842 Cabot Blvd., Hayard, CA 94545.
8. Part No. 7593-01-CF BNC electrical feedthrough on a 1.33 in. o.d. flange from Ceramaseal, PO Box 260, Route 20, Lebanon, NY 12125.
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13. Model No. 808, Eurotherm, 11485 Sunset Hills Road, Reston, VA 22090-5286.
14. Part No. AD620BN, Analog Devices, PO Box 9106, Norwood, MA 02062-9106.
15. Part No. 4127, Burr Brown, 6730 S. Tucson Blvd., Tucson, AZ 85734-1400.
16. Part No. OP200EZ, Analog Devices, PO Box 9106, Norwood, MA 02062-9106.
17. Part No. LM12CLK, National Semiconductor, PO Box 58090, Santa Clara, CA 95052-8090.
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19. J. A. Stroscio, D. T. Pierce, M. D. Stiles, A. Zangwill, and L. M. Sander, Phys. Rev. Lett. 75, 4246 (1995).