Bulk growth of wide band gap II-VI compound semiconductors by physical vapor transport

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3123, Issue , 1997, Pages 7-21

  Su, Ching Hua ^a  

^a NASA MARSHALL SPACE FLIGHT CENTER   (United States)

Author keywords

II VI compound semiconductors; Physical Vapor Transport (PVT)

Indexed keywords

CHEMICAL ANALYSIS; CRYSTAL DEFECTS; CRYSTALS; DIFFUSION; ELECTRIC CONDUCTIVITY; ENERGY GAP; EXTRACTIVE METALLURGY; GAS ABSORPTION; GRAVITATION; GRAVITATIONAL EFFECTS; HEAT TREATING FURNACES; HEAT TREATMENT; MATERIALS; MATERIALS SCIENCE; PRESSURE MEASUREMENT; SEMICONDUCTOR GROWTH; STOICHIOMETRY; VAPORS; VEGETATION;

BULK CRYSTALS; BULK GROWTH; DIFFUSION MODELING; HIGH QUALITY (HQ); II-VI COMPOUND SEMICONDUCTORS; II-VI SEMICONDUCTORS; IN-SITU; MASS FLUXES; PHYSICAL VAPOR TRANSPORT (PVT); PHYSICAL VAPOR TRANSPORT (VPT); RESIDUAL GASES; SOURCE MATERIALS; STRUCTURAL DEFECTS; TOTAL PRESSURE; TRANSPORT RATES; TREATMENT METHODS; VAPOR COMPOSITION; VAPOR PHASE; VAPOR TRANSPORTING; WIDE BANDS;

SEMICONDUCTOR MATERIALS;

EID: 0346424924     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.277715     Document Type: Conference Paper

References (109)

1. for example: Morkoc, H., Strite, S., Gao, G. B., Lin, M.E., Sverdlov, B. & Burns, M. 1994, J. Appl. Phys. 76, 1363;
2. Krasnov, A. N., Purtov, Yu. N., Vaksman, Yu. F. & Serdyuk, V. V. 1992, J. Crystal Growth 125, 373;
3. Kukimoto, H. 1991, Semicond. Sci. Technol. 6, A14.
4. for example: Yang, X. H., Hays, J. M., Shan, W., Song, J. J. & Cantwell, E. 1993, Appl. Phys. Lett. 62, 1072;
5. Jeon, H., Ding, J., Nurmikko, A. V., Xie, W., Grillo, D. C., Kobayashi, M., Gunshor, R. L., Hua, G. C. & Otsuka, N. 1992, Appl. Phys. Lett. 60, 2045;
6. Nakanishi, K., Suemune, I., Fujii, Y., Kuroda, Y. & Yamanishi, M. 1991, Appl. Phys. Lett. 59, 1401;
7. Neumark, G. F., Park, R. M. & Depuydt J. M. 1994, Physics Today, June, 26;
8. Daneu, V., DeGloria, D. P., Sanchez, A., Tong, F. & Osgood, Jr. R. M. 1986, Appl. Phys. Lett. 49, 546.
9. Howie, J. A. B., Rowles, G. K. & Hawkins, P. 1991, Meas. Sci. Technol. 2, 1070.
10. for example: Yang, X. H., Hays, J., Shan, W., Song, J. J., Cantwell, E. & Aldridge, J. 1992, Appl. Phys. Lett. 60, 926;
11. Jeon, H., Ding, J., Patterson, W., Nurmikko, A. V., Xie, W., Grillo, D. C., Kobayashi, M. & Gunshor, R. L. 1991, Appl. Phys. Lett. 59, 3619.
12. Ichino, K., Wu, Y.-H., Kawakami, Y., Fujita, S. & Fujita, S. 1992, J. Crystal Growth 117, 527.
13. Triboulet, R. 1991, Semicon. Sci. Technol. 6, A18.
14. Lauck, R., Muller-Vogt, G. & Wendl, W. 1986, J. Crystal Growth 74, 520.
15. for example: Chernov, A. A., 1974, J. Crystal Growth 24/25, 11;
16. Rosenberger, F., Delong, M. C., Greenwell, D. W., Olson, J. M. & Westphal, G. H. 1975, J. Crystal Growth 29, 49;
17. Xiao, R.-F., Alexander, J. I. & Rosenberger, F. 1990, J. Crystal Growth 100, 313.
18. Chen, J.-S., Ming, N.-B., Rosenberger, F. 1986, J. Chem. Phys. 84, 2365.
19. Sharma, R. C. & Chang, Y. A. 1988, J. Crystal Growth 88, 193.
20. Sha, Y.-G., Su, C.-H., Palosz, W., Volz, M. P., Gillies, D. C., Szofran, F. R., Lehoczky, S. L., Liu, H.-C. & Brebrick, R. F. 1995, J. Crystal Growth 146 42;
21. Su, C.-H., Sha, Y.-G., Mazuruk, K., Lehoczky, S. L., Liu, H.-C., Fang, R. & Brebrick, R. F. 1996, J. Crystal Growth 166, 736.
22. Brebrick, R. F. & Liu, H. 1996, High Temp. Mater. Sci. 35 215.
23. Brebrick, R. F. 1969, J. Electrochem. Soc. 116, 1274.
24. Goldfinger, P. & Jeunehomme, M. 1963, Trans. Faraday Soc. 59, 2851.
25. Floegel, P. Z. 1969, Anorg. Allg. Chem. 370, 16.
26. Brebrick, R. F. 1971, J. Electrochem. Soc. 118, 2014.
27. Huang, Y. & Brebrick, R. F. 1988, J. Electrochem. Soc. 135, 486.
28. Brebrick, R. F. & Strauss, A. J. 1964, J. Chem. Phys. 40, 3230.
29. Northrop, D. A. 1971, J. Phys. Chem. 75, 118.
30. Brebrick, R. F. & Strauss, A. J. 1964, J. Chem. Phys. 41, 197.
31. Huang, Y. & Brebrick, R. F. 1988, J. Electrochem. Soc. 135, 1547.
32. JANAF Thermochemical Tables, 1971, NSRDS-NBS, Natl. Bur. Std. (US), Washington, DC, 2nd ed.;
33. Piechotka, M. & Kaldis, E. 1986, J. Less Common Metals 115, 315.
34. Cadoret, R., Brisson, P. & Magnan, A. 1989, Nucl. Inst. Meth. A283, 339.
35. Faktor, M. M. & Garrett, I. 1974, Growth of Crystals from the Vapour, Chapman and Hall, London.
36. Su, C.-H. 1987, J. Crystal Growth 80, 333.
37. Reid, R. C., Prausnitz, J. M. & Sherwood, T. K. 1977, The Properties of Gases and Liquids, McGraw-Hill, New York, 3rd ed.
38. for example: Russell, G. J. & Woods, J. 1979, J. Crystal Growth 46, 323;
39. Schmidt, G. & Gruehn, R. 1982, J. Crystal Growth 57, 585;
40. Morimoto, Y., Igarashi, T., Sugahara, H. & Nasu, S. 1992, J. Non-Cryst. Solids 139, 35.
41. Harman, T. C. & McVittie, J. P. 1974, J. Electron. Mater. 3, 843.
42. Palosz, W. & Wiedemeier, H. 1993, J. Crystal Growth 131, 193.
43. Palosz, W., Szofran, F. R. & Lehoczky, S. L. 1994, J. Crystal Growth 142, 215.
44. Sherwood, T. K. 1937, Absorption and Extraction, McGraw-Hill, New York.
45. Palosz, W. & Wiedemeier, H. 1993, J. Crystal Growth 129, 653.
46. Piper, W. & Polich, S. J. 1961, J. Appl. Phys. 32, 1278.
47. Catano, A. & Kun, Z. K. 1976, J. Crystal Growth 33, 324.
48. Kaldis, E. 1965, J. Phys. Chem. Solids 26, 1701.
49. Ohno, T., Kurisu, K. & Taguchi, T. 1990, J. Crystal Growth 99, 737.
50. Burr, K. F. & Woods, J. 1971, J. Crystal Growth 9, 183.
51. Prior, A. C. 1961, J. Electrochem. Soc. 108, 82.
52. Igaki, K., Ohashi, N. & Mochizuki, K. 1976, Jap. J. Appl. Phys. 15, 1429.
53. Igaki, K. & Mochizuki, K. 1974, J. Crystal Growth 24/25, 162.
54. Mochizuki, K. 1981, J. Crystal Growth 51, 453.
55. Mochizuki, K. 1981, J. Crystal Growth 53, 355.
56. Kiyosawa, T., Igaki, K. & Ohashi, N. 1972, Trans. Jap. Inst. Metals 13, 248.
57. Hoschl, P. & Konak, C. 1965, Phys. Stat. Sol. 9, 167.
58. Cutter, J. R. & Woods, J. 1979, J. Crystal Growth 47, 405.
59. Clark, L. & Woods, J. 1968, J. Crystal Growth 3/4, 126.
60. Brebrick, R. F. & Strauss, A. J. 1965, J. Phys. Chem. Solids 26, 989.
61. Su, C.-H., Liao, P.-K., Tung, T. & Brebrick, R. F. 1981, High Temp. Sci. 14, 181.
62. Brebrick, R. F. 1965, J. Chem. Phys. 43, 3846.
63. Schwartz, J. P., Tung, T. & Brebrick, R. F. 1981, J. Electrochem. Soc. 128, 438.
64. Tung, T., Golonka, L. & Brebrick, R. F. 1981, J. Electrochem. Soc. 128, 451.
65. Su, C.-H., Liao, P.-K. & Brebrick, R. F. 1985, J. Electrochem. Soc. 132, 942.
66. Chen, K.-T., Sha, Y.-G. & Brebrick, R. F. 1990, J. Vac. Sci. Technol. A8, 1086.
67. Murray, J. J., Pottie, R. F. & Sander, R. L. 1973, J. Mater. Sci. 8, 37.
68. Morimoto, Y., Igarashi, T., Sugahara, H. & Nasu, S. 1992, J. Non-Cryst. Solids 139, 35.
69. Zha, M., Piechotka, M. & Kaldis, E. 1991, J. Crystal Growth 115, 43.
70. Kaldis, E. & Piechotka, M. 1994, Handbook of Crystal Growth, Vol. 2, Chap. 11, Elsevier Science, North-Holland.
71. Zoutendyk, J. A. & Akutagawa, W. M. 1982, Mater. Processing in the Reduced Gravity Environment of Space, Elsevier Science, Rindone, G. E. Editor, p. 449.
72. Wiedemeier, H., Chandra, D. & Klaessic, F. C. 1981, J. Crystal Growth 51, 345.
73. Mochizuki, K. & Igaki, K. 1978, J. Crystal Growth 45, 218.
74. Mochizuki, K. 1982, J. Crystal Growth 58, 87.
75. Kaldis, E. 1969, J. Crystal Growth 5, 376.
76. Parker, S. 1971, J. Crystal growth 9, 177.
77. Koyama, T., Yodo, T., Oka, H., Yamashita, K. & Yamasaki, T. 1988, J. Crystal Growth 91, 639.
78. Recker, K. & Schoepe, R. 1971, J. Crystal Growth 9, 189.
79. Parker, S. G. & Pinnell, J. E. 1969, Trans. Meta. Soc. AIME 245, 451.
80. Hartmann, H. 1977, J. Crystal Growth 42, 144.
81. Fujita, S., Mimoto, H., Takebe, H. & Noguchi, T. 1979, J. Crystal Growth 47, 326.
82. Russell, G. J. & Woods, J. 1979, J. Crystal Growth 47, 647.
83. Morimoto, J., Ito, T., Yoshioka, T. & Miyakawa, T. 1982, J. Crystal Growth 57, 362.
84. Markov, E. V. & Davydov, A. A. 1971, Neorg. Mater. 7, 575.
85. Davydov, A. A. Ermolov, V. N., Neustroev, S. V. & Pavlova, L. P. 1992, Neorg. Mater. 28, 42.
86. Cantwell, G., Harsch, W. C., Cotal, H. L., Markey, B. G., McKeever, S. W. S. & Thomas, J. E. 1992, J. Appl. Phys. 71, 2931.
87. Hemmat, N. & Weinstein, M. 1967, J. Electrochem. Soc. 114, 851.
88. Su, C.-H., Lehoczky, S. L. & Szofran, F. R. 1990, J. Crystal Growth 101, 221.
89. Su, C.-H., Volz, M. P., Gillies, D. C., Szofran, F. R., Lehoczky, S. L., Dudley, M., Yao, G.-D. & Zhou, W. 1993, J. Crystal Growth 128, 627.
90. Taguchi, T., Fujita, S. & Inuishi, Y. 1978, J. Crystal growth 45, 204.
91. Anderson, E., Cheng, H.-Y. & Edgell, M. J. 1989, Mater. Res. Soc. Symp. Proc. 152, 51.
92. Cheng, H.-Y. & Anderson, E. 1989, J. Crystal Growth 96, 756.
93. Allegretti, F., Carrara, A. & Pizzini, S. 1993, J. Crystal Growth 128, 646.
94. Su, C.-H., Sha, Y.-G., Volz, M. P., Gillies, D. C., Szofran, F. R., Lehoczky, S. L., Zhou, W., Dudley, M., Liu, H.-C., Brebrick, R. F. & Wang, J. C. 1994, Proc. AIAA 32nd Aerospace Sciences Meeting, paper 94-0564.
95. Russell, G. J., Thompson, N. F. & Woods, J. 1985, J. Crystal Growth 71, 621.
96. Fochs, P. D., George, W. & Augustus, P. D. 1968, J Crystal Growth 3/4, 122.
97. Hartmann, H. & Siche, D. 1994, J. Crystal Growth 138, 260.
98. Grasza, K., Zuzga-Grasza, U., Jedrzejczak, A., Galazka, R. R., Majewski, J., Szadkowski, A. & Grodzicka, E. 1992, J. Crystal Growth 123, 519.
99. Jordan, A. S. & Derick, L. 1969, J. Electrochem. Soc. 116, 1424.
100. Sha, Y.-G., Su, C.-H. & Szofran, F. R. 1993, J. Crystal Growth 131, 574.
101. Chen, K.-T., George, M. A., Zhang, Y., Burger, A., Su, C.-H., Sha, Y.-G., Gillies, D. C. & Lehoczky, S. L. 1995, J. Crystal Growth 147 292.
102. for example: Su, C.-H., Perry, G. L. E., Szofran, F. R. & Lehoczky, S. L. 1988, J. Crystal Growth 91, 20;
103. Su, C.-H., Lehoczky, S. L. & Szofran, F. R. 1991, J. Crystal Growth 109, 392.
104. Volz, M. P., Su, C.-H., Lehoczky, S. L. & Szofran, F. R. 1992, Phys. Rev. B46, 76.
105. Zhou, W., Wu, J., Dudley, M., Su, C.-H., Volz, M. P., Gillies, D. C., Szofran, F. R. & Lehoczky, S. L. 1993, Mater. Res. Soc. Symp. Proc., Infrared Detectors-Materials, Processing, and Devices, Applebaum, A. & Dawson, L. R., Editors, p. 299.
106. Zhou, W., Dudley, M., Wu, J., Su, C.-H., Volz, M. P., Gillies, D. C., Szofran, F. R. & Lehoczky, S. L. 1994, Mater. Sci. & Eng. B27, 143.
107. Biao, Y., Azoulay, M., George, M. A., Burger, A., Collins, W. E., Silberman, E., Su, C.-H., Volz, M. E., Szofran, F. R. & Gillies, D. C. 1994, J. Crystal Growth 138, 219.
108. Chen, K.-T., Zhang, Y., Egarievwe, S. U., George, M. A., Burger, A., Su, C.-H., Sha, Y.-G. & Lehoczky, S. L. 1996, J. Crystal Growth 166, 721.
109. Yoshioka, Y., Yoda, H. & Kasuga, M. 1991, J. Crystal Growth 115, 705.