Applying statistical methods to implement dry polymer removal techniques

MICRO

Volumn 19, Issue 8, 2001, Pages 57-66

  Martinetti, Manuela ^a,b   Caputo, Gaetano ^c,d   Oggioni, Laura ^b   Zini, Ernesto ^e   Wurthwein, Arturo ^f  

^a Axcelis Technologies   (Italy)

^b UNIVERSITY OF MILAN   (Italy)

^c STMICROELECTRONICS   (Italy)

^d SAPIENZA UNIVERSITY OF ROME   (Italy)

^e The Galileo Galilei Institute for Theoretical Physics Arcetri   (Italy)

^f CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346406747     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. RD Moen, TW Nolan, and LP Provost, Improving Quality through Planned Experimentation (New York: McGraw-Hill, 1991).
2. J Palazzini, I Schirrecker, and G Dahrooge, "Joint Process Development of FEOL Residue Removal Applications," European Semiconductor (April 2001).
3. 2 Chemistry on GES System" (paper presented at ICON 2001, San Diego, May 6-9, 2001).