SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 34-39

Residual stress in silicon dioxide thin films produced by ion-assisted deposition

(4) Robic, J Y a Leplan, H b Pauleau, Y c Rafin, B a

a CEA LETI (France)

b SFIM ODS (France)

c GRENOBLE INSTITUTE OF TECHNOLOGY (France)

Author keywords

Ion assisted deposition; Optical properties; Residual stress; Silicon oxide

Indexed keywords

DENSITY MEASUREMENT (SPECIFIC GRAVITY); DEPOSITION; OPTICAL CORRELATION; RESIDUAL STRESSES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICA; SPECTROPHOTOMETRY; SUBSTRATES; THIN FILMS;

INTRINSIC STRESSES; ION ASSISTED DEPOSITION; WATER INDUCED STRESSES;

OPTICAL FILMS;

EID: 0346350533 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09174-2 Document Type: Article

Times cited : (30)

References (15)

1
- 0001442570
- B. Bhushan, S.P. Murarka and J. Gerlach, J. Vac. Sci. Technol. B, 8 (1990) 1068.
- (1990) J. Vac. Sci. Technol. B , vol.8 , pp. 1068
- Bhushan, B.¹ Murarka, S.P.² Gerlach, J.³

2
- 0027683539
- C.J. Stolz, J.R. Taylor, W.K. Eickelberg and J.D. Lindh, Appl. Opt., 32 (1993) 5666.
- (1993) Appl. Opt. , vol.32 , pp. 5666
- Stolz, C.J.¹ Taylor, J.R.² Eickelberg, W.K.³ Lindh, J.D.⁴

3
- 0042823879
- Technical Digest Series, Optical Society of America, Washington DC
- L. Nouvelot and R. Bosmans, Optical Interference Coating, Vol. 17, Technical Digest Series, 1995, Optical Society of America, Washington DC, p. 275.
- (1995) Optical Interference Coating , vol.17 , pp. 275
- Nouvelot, L.¹ Bosmans, R.²

4
- 4243139335
- SPIE, Bellingham, WA
- H. Leplan, B. Greenen, J.Y. Robicand Y. Pauleau, Optical Interference Coatings, Proc. SPIE, Vol. 2253, SPIE, Bellingham, WA, 1994, p. 1263.
- (1994) Optical Interference Coatings, Proc. SPIE , vol.2253 , pp. 1263
- Leplan, H.¹ Greenen, B.² Robicand, J.Y.³ Pauleau, Y.⁴

5
- 0000282358
- H. Leplan, B. Greenen, J.Y. Robic and Y. Pauleau, J. Appl. Phys., 78 (2) (1995) 962.
- (1995) J. Appl. Phys. , vol.78 , Issue.2 , pp. 962
- Leplan, H.¹ Greenen, B.² Robic, J.Y.³ Pauleau, Y.⁴

6
- 0000528677
- H. Leplan, J.Y. Robic and Y. Pauleau, J. Appl. Phys., 79 (9), (1996) 6926.
- (1996) J. Appl. Phys. , vol.79 , Issue.9 , pp. 6926
- Leplan, H.¹ Robic, J.Y.² Pauleau, Y.³

7
- 0042322764
- French Patent 2644180, 1991; US Patent 5074246, 1991
- French Patent 2644180, 1991; US Patent 5074246, 1991.

8
- 0042322765
- SPIE, Bellingham, WA
- M. Ida, P. Chaton and B. Rafin, Optical Interference Coatings, Proc. SPIE, Vol. 2253, SPIE, Bellingham, WA, 1994, p. 404.
- (1994) Optical Interference Coatings, Proc. SPIE , vol.2253 , pp. 404
- Ida, M.¹ Chaton, P.² Rafin, B.³

9
- 0001499238
- K.H. Muller, Surf. Sci., 184 (1987) 375.
- (1987) Surf. Sci. , vol.184 , pp. 375
- Muller, K.H.¹

10
- 0001506662
- J.D. Targove and H.A. Macleod, Appl. Opt., 27 (1988) 3779.
- (1988) Appl. Opt. , vol.27 , pp. 3779
- Targove, J.D.¹ Macleod, H.A.²

11
- 0027002459
- H. Windischmann, Crit. Rev. Solid State Mater. Sci., 17 (1992) 547.
- (1992) Crit. Rev. Solid State Mater. Sci. , vol.17 , pp. 547
- Windischmann, H.¹

12
- 0007568096
- D. Van Vechten, G.K. Hubler, E.P. Donavan and F.D. Correl, J. Vac. Sci. Technol. A, 8 (1990) 821.
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 821
- Van Vechten, D.¹ Hubler, G.K.² Donavan, E.P.³ Correl, F.D.⁴

13
- 21544431995
- H. Windischmann, J. Appl. Phys., 62 (1987) 1800.
- (1987) J. Appl. Phys. , vol.62 , pp. 1800
- Windischmann, H.¹

14
- 0019086482
- E.H. Hirsch, J. Phys. D, 13 (1980) 2081.
- (1980) J. Phys. D , vol.13 , pp. 2081
- Hirsch, E.H.¹

15
- 0041821867
- PhD Thesis, Institut National Polytechnique de Grenoble
- H. Leplan, PhD Thesis, Institut National Polytechnique de Grenoble, 1995.
- (1995)
- Leplan, H.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.