Reactions of diethylgermane, triethylgermane, and ethyl groups on Ge(100)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1140-1145

  Chen, Jihong ^a,b   Michael Greenlief, C ^a  

^a UNIVERSITY OF MISSOURI   (United States)

^b University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETHYL GROUPS; GE THIN FILMS; GE(100); GE(100) SURFACE; GERMANIUM FILMS; HIGHER TEMPERATURES; HYDRIDE ELIMINATION; ISOTOPIC LABELING; REACTION STEPS; ROOM TEMPERATURE; SI(100) SURFACE;

ADSORPTION; DEPOSITION; EPITAXIAL FILMS; ETHYLENE;

GERMANIUM;

EID: 0346335451     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580444     Document Type: Article

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