Construction of a windowless Si-anode X-ray tube for a more efficient excitation of low Z elements on Si-wafer surfaces in total reflection fluorescence analysis

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 58, Issue 12, 2003, Pages 2069-2077

  Meinschad, Th ^a   Streli, C ^a   Wobrauschek, P ^a   Eisenmenger Sittner, Ch ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Light elements; Si anode X ray tube; TXRF; Wafer surface quality control; Windowless tube

Indexed keywords

ANODES; FLUXES; INTEGRATED CIRCUITS; MULTILAYERS; PHOTONS; QUALITY CONTROL; SCATTERING; SILICON WAFERS; SPUTTERING; SUBSTRATES; VACUUM APPLICATIONS; X RAY TUBES;

CUT-OFF FILTERS; SELF-ABSORPTION;

SEMICONDUCTING SILICON;

EID: 0346331074     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(03)00223-4     Document Type: Conference Paper

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