Nanostructuring of laser-deposited thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2703, Issue , 1996, Pages 458-467

  Pompe, Wolfgang ^a   Gorbunov, Andre A ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Laserchemical reaction; Multilayers; Nanofabrication; Optical proximity effects; Pulsed laser deposition; Scanning tunneling microprocessing

Indexed keywords

DIFFRACTION; ELECTROMAGNETIC WAVE DIFFRACTION; GOLD DEPOSITS; LASERS; MICROELECTRONICS; MULTILAYERS; OPTICAL MULTILAYERS; PLASMA DEPOSITION; PLASMAS; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; SCANNING; SILVER; SOLID SOLUTIONS; SOLIDS; THIN FILMS; TITANIUM; TITANIUM OXIDES; TUNNELING (EXCAVATION); ULTRATHIN FILMS;

CROSSED BEAMS; DEPOSITED THIN FILMS; DIFFRACTION LIMITS; DISPERSE STRUCTURES; ENERGY DISTRIBUTIONS; FERROMAGNETIC PARTICLES; LASER ANNEALING; LASERCHEMICAL REACTION; LATERAL RESOLUTIONS; LATERAL SIZES; LOCALIZED OXIDATIONS; NANOFABRICATION; NANOSTRUCTURED METALS; NANOSTRUCTURING; NEAR FIELDS; NON LINEARITIES; OPTICAL PROXIMITY EFFECTS; OPTICAL-; PLASMA PARTICLES; THIN GOLD FILMS; TITANIUM FILMS; TUNNELING MICROSCOPES;

FILM PREPARATION;

EID: 0346327740     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.237756     Document Type: Conference Paper

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