Solvent diffusion in porous low-k dielectric films

Materials Research Society Symposium - Proceedings

Volumn 766, Issue , 2003, Pages 229-234

  Shamiryan, Denis ^a,b   Maex, Karen ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; DENSITY (SPECIFIC GRAVITY); DIFFUSION; MATHEMATICAL MODELS; PERMITTIVITY; POROSITY; POROUS MATERIALS; SOLVENTS; VISCOUS FLOW;

NON-POLAR SOLVENTS; SILICON OXYCARBIDE; SOLVENT DIFFUSION;

DIELECTRIC FILMS;

EID: 0346308387     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-766-e9.11     Document Type: Conference Paper

References (10)

1. K. Maex, M. R. Baklanov, D. Shamiryan, F. Iacopi, S. H. Brongersma, and Z. S. Yanovitskaya, J. Appl. Phys. 93, (2003) (in press).
2. L. R. Snyder and J. J. Kirkland. Introduction to modern liquid chromatography. 2-nd edition, (A Wiley-Interscience Publication, New York, 1979).
3. L. R. Snyder. Principles of adsorption chromatography, (Dekker, New York, 1968).
4. D. Shamiryan, M. R. Baklanov, S. Vanhaelemeersch, and K. Maex, Electrochem. Sol. St. Lett. 4, F3 (2001).
5. F. N. Dultsev and M. R. Baklanov, Electrochem. Sol. St. Lett. 2, 192 (1999).
6. G. Vereecke, E. Kondoh, P. Richardson, K. Maex, M. M. Heyns and Z. Nényei. IEEE Trans. Semicond. Manuf. 13, 315 (2000).
7. P. W. Atkins. Physical Chemistry. 6th edition, (Oxford university press, 1998) p. 753.
8. J. Rouquerol, D. Avnir, C. W. Fairbridge, D. H. Everett, J. H. Haynes, N. Pernicone, J. D. F. Ramsay, K. S. W. Sing and K. K. Unger. Pure & Appl. Chem. 66, 1739 (1994).
9. D. D. Do. Adsorption analysis: equilibria and kinetics. Series on chemical engineering, vol.2, (Imperial College Press, London, 1998) p.374.
10. ibid ref. 9, p.398.