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Applied Surface Science

Volumn 223, Issue 1-3, 2004, Pages 224-228

Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange

(3) Chang, K S a Aronova, M A a Takeuchi, I a

a UNIVERSITY OF MARYLAND (United States)

Author keywords

High throughout; Pulsed laser deposition; Thin film

Indexed keywords

CHEMICAL SENSORS; CHEMICAL VAPOR DEPOSITION; COMPOSITION; FILM GROWTH; FLANGES; HEAT TRANSFER; MAGNETIZATION; MICROPROCESSOR CHIPS; MOLECULAR BEAM EPITAXY; MULTILAYERS; SPUTTERING; SUPERCONDUCTIVITY; THIN FILMS; VAPOR PRESSURE;

HETEROEPITAXIAL MULTILAYERS; THIN FILM DEPOSITION;

PULSED LASER DEPOSITION;

EID: 0346304796 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(03)00926-7 Document Type: Article

Times cited : (6)

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