Method of calculating interfacial roughness of multilayers for soft X-ray

Guangxue Xuebao/Acta Optica Sinica

Volumn 23, Issue 8, 2003, Pages 980-983

  Feng, Shimeng ^a   Zhao, Haiying ^a   Huang, Meizhen ^a   Fan, Zhengxiu ^b   Shao, Jianda ^b   Dou, Xiaoming ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Multilayer; Roughness; Thin film optics; X ray diffraction intensity

Indexed keywords

CALCULATIONS; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; OPTICAL MULTILAYERS; ROUGHNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

INTERFACIAL ROUGHNESS; OPTICAL THIN FILMS; SOFT X RAY; X RAY DIFFRACTION INTENSITY;

THIN FILMS;

EID: 0346092513     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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