High sensitivity (25 μm pitch) microbolometer FPAs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4454, Issue , 2001, Pages 147-159

  Murphy, D ^a   Ray, M ^a   Wyles, R ^a   Asbrock, J ^a   Lum, N ^a   Kennedy, A ^a   Wyles, J ^a   Hewitt, C ^a   Graham, G ^a   Horikiri, T ^a   Anderson, J ^a   Bradley, D ^a   Chin, R ^a   Kostrzewa, T ^a  

^a RAYTHEON COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; COST EFFECTIVENESS; FABRICATION; IMAGE QUALITY; INFRARED DETECTORS; MICROMACHINING; OPTICAL RESOLVING POWER; PERFORMANCE;

FOCAL PLANE ARRAYS; MICROBOLOMETER; OPTICAL FILL FACTOR; PIXEL OPERABILITY; PIXEL SIZE; THERMAL ISOLATION;

BOLOMETERS;

EID: 0346087379     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448169     Document Type: Conference Paper

References (11)

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8. D. Murphy, W. Radford, M. Ray, S. Propst, A. Kennedy, J. Kojiro, J. Woolaway, K. Soch, R. Coda, G. Lung, E. Moody, D. Gleichman, and S. Baur, "320 × 240 Silicon Microbolometer Uncooled IRFPAs with On-chip Offset Correction," Proceedings of SPIE, Vol. 2746, pp. 82-92, April 1996.
9. D. Murphy, W. Radford, J. Finch, A. Kennedy, J. Wyles, M. Ray, G. Polchin, N Hua, C. Peterson, S. Silverman, C. Laufer, and M. Pavlov, "Multi-spectral Uncooled Microbolometer Sensor for the Mars 2001 Orbiter THEMIS Instrument," Proceedings of the 2000 IEEE Aerospace Conference, Big Sky, Montana March 2000
10. W. Radford, D. Murphy, R. Wyles, J. Wyles, J. Varesi, M. Ray, A. Kennedy, A. Finch, E. Moody, F. Cheung, T. Kostrzewa, "High Sensitivity 320 × 240 (25 μm Pitch) Microbolometer FPAs," Proceedings of National Military Sensing Symposium (MSS), Charleston, SC. November 1999
11. D. Murphy, W. Radford, R. Wyles, J. Wyles, M. Ray, A. Kennedy, J. Anderson, R. Chin, D. Bradley, T. Kostrzewa, "High Sensitivity 320 × 240 (25 μm Pitch) Microbolometer FPAs and Applications Development," Proceedings of International Military Sensing Symposium (MSS), Palaiseau, France. September 2000