The dissolution of copper in common solvents used for low dielectric polymers

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 486-489

  Purdy, Andrew P ^a   Godbey, David ^a   Buckley, Leonard ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Copper; Dissolution; Polymers; Solvents

Indexed keywords

DIELECTRIC MATERIALS; DISSOLUTION; ORGANIC SOLVENTS; PERMITTIVITY; POLYMERS; X RAY DIFFRACTION;

SOLID REACTION PRODUCTS; SPOT TESTS;

COPPER;

EID: 0346045988     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00489-6     Document Type: Article

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