Calibration of reference materials for total-reflection X-ray fluorescence analysis by heavy ion backscattering spectrometry

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 52, Issue 7, 1997, Pages 881-886

  Werho, D ^a   Gregory, R ^a   Schauer, S ^a   Liu, X ^a   Carney, G ^a   Banks, J ^b   Knapp, J ^b   Doyle, B ^b   Diebold, A C ^c  

^a MOTOROLA INC   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c SEMATECH   (United States)

Author keywords

Ion backscattering spectrometry (IBS); Reference material; TXRF: total reflection X ray fluorescence

Indexed keywords

CALIBRATION; ELECTROMAGNETIC WAVE BACKSCATTERING; FLUORESCENCE;

HEAVY ION BACKSCATTERING SPECTROMETRY (HIBS); TOTAL REFLECTION X RAY FLUORESCENCE (TXRF);

X RAY ANALYSIS;

EID: 0345949187     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(96)01641-2     Document Type: Article

References (16)

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