Surface cleaning on aluminum for ultrahigh vacuum using supercritical fluid CO2 with H2O and NaCl as additives

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1391-1393

  Momose, T ^a,b   Yoshida, H ^a   Sherverni, Z ^a   Ebina, T ^a   Tatenuma, K ^a,c   Ikushima, Y ^a  

^a TOHOKU NATL INDUST RES INSTITUTE   (Japan)

^b SENDAI NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^c KAKEN Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345931923     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581825     Document Type: Article

References (5)

1. T. Momose, K. Asano, N. Ohta, Y. Kanda, and H. Ishimaru, J. Vac. Sci. Technol. A 13, 488 (1995).
2. T. Momose, Y. Maeda, K. Asano, and H. Tshimaru, J. Vac. Sci. Technol. A 13, 515 (1995).
3. T. Momose, E. Hayasaka, K. Saitou, K. Nagayama, and S. Abe, J. Vac. Sci. Technol. A 16, 961 (1998).
4. T. Momose, K. Asano, Y. Katoh, and H. Ishimaru, Vacuum 47, 319 (1996).
5. E. M. Russick, G. A. Poulter, C. L. Adkins, and N. R. Sorensen, J. Supercrit. Fluids 9, 43 (1996).