Understanding the Formation of Etching Patterns Using a Refined Monte Carlo Simulation Model

Crystal Growth and Design

Volumn 2, Issue 3, 2002, Pages 177-184

  Li, Tonglei ^a   Park, Kinam ^a   Morris, Kenneth R ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345793995     PISSN: 15287483     EISSN: None     Source Type: Journal    
DOI: 10.1021/cg020002q     Document Type: Article

References (20)

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