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Volumn 34, Issue 6, 1997, Pages 929-939
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Synthesis of a photosensitive poly(arylene ether) containing pendant benzoyl groups
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Author keywords
Nucleophilic substitution; Pendant benzoyl groups; Photosensitive polymer; Photosensitivity; Poly(arylene ether); Positive type resist
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Indexed keywords
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EID: 0345727211
PISSN: 10601325
EISSN: None
Source Type: Journal
DOI: 10.1080/10601329708015001 Document Type: Article |
Times cited : (5)
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References (13)
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